Atomic composition of rf-sputtered alumina coatings determined by XPS-method

Viljo Markus Pessa (Speaker)

    Activity: Talk or presentationConference presentation

    Period1982
    Event titlepresented in Nordic Conference on Surface Science, 18-20.8., Tampere
    Event typeConference

    Publication forum classification

    • No publication forum level

    Country of activity

    • Finland