Atomic layer deposition of metal oxide films as diffusion barriers on flexible packaging materials

  • Markus Kimmo Tapio Lahtinen (Speaker)

    Activity: Talk or presentationConference presentation

    Period2010
    Event titleSociety of Vacuum Coaters, 53rd Annual Technical Conference, April 17-22, 2010, Orlando, Florida
    Event typeConference

    Country of activity

    • United States

    Publication forum classification

    • No publication forum level