Block Copolymer Nanolithography for Sub-50 nm Structure Applications

Activity: Evaluation, examination and supervisionPre-examination of dissertation or acting as opponent to doctoral students

Description

Block copolymer (BCP) lithography is a promising technique, which
has single digit nanometer resolution, has a pattern periodicity of about 7-200 nm, and easily scales up to large area at a low cost.
Period1 Oct 202126 Nov 2021
Examination held at
  • Lund Univ, Lund University
Degree of RecognitionInternational