Calibration improvement for piezoresistive coefficients of stress sensors on (100) silicon

  • Weixia Song (Speaker)

    Activity: Talk or presentationConference presentation

    Period2003
    Event titleProceedings of the 20th Nordic Semiconductor Meeting, ORC, Tampere University of Technology, Tampere, Finland, August 25-27, 2003
    Event typeConference

    Country of activity

    • United States

    Publication forum classification

    • No publication forum level