Composition of RF-sputtered alumina coatings determined by XPS method

Tapio Mäntylä (Speaker)

    Activity: Talk or presentationConference presentation

    Period1982
    Event titleProc. XVI Annual Conference of the Finnish Physical Society, Espoo, 12-13 Feb
    Event typeConference

    Publication forum classification

    • No publication forum level

    Country of activity

    • Finland