Deposition of Al2O3 by H20 & AlCl3-Reaction

    Activity: Talk or presentation › Conference presentation

    Period1985
    Event titleProc. of the Fifth European Conference on Chemical Vapour Deposition, eds. J-O. Carlsson, J. Lindström, Uppsala University, Department of Chemistry
    Event typeConference

    Country of activity

    • Sweden

    Publication forum classification

    • No publication forum level