Experiments with the Micro LPC110 Clean Room Particle Counter

    Activity: Talk or presentation › Conference presentation

    Period1988
    Event titleSymposium on Particulate Contamination Control in Microelectroni cs, AAAR`88 Annual Meeting, Chapel Hill, USA, 10.-14.10.1988
    Event typeConference

    Country of activity

    • United States

    Publication forum classification

    • No publication forum level