Fast step bunching method for surface morphology simulations of anisotropic etching

  • Teemu Hynninen (Speaker)

    Activity: Talk or presentation › Conference presentation

    Period2006
    Event titlePCWES, 21.6.2006, Saarbrucken, Germany
    Event typeConference

    Country of activity

    • United States

    Publication forum classification

    • No publication forum level