Reveal the Surface Defect Pits of AlGaAs Related Epitaxial Layer by Wet Oxidation

  • Tomi Pekka Jouhti (Speaker)

    Activity: Talk or presentation › Conference presentation

    Period2003
    Event titleE-MRS 2003 Spring Meeting, Strasbourg, France, June 10-13, 2003
    Event typeConference

    Country of activity

    • France

    Publication forum classification

    • No publication forum level