SiGe/Si Heterostructures Produced by Double-Energy Si+ and Ge+, and Ge+ and Ge2+ Ion Implantations

  • Eero Olavi Ristolainen (Speaker)

    Activity: Talk or presentation › Conference presentation

    Period1997
    Event titleAmerican Vacuum Society, 44th National Symposium, October 20-24, 1997, San Jose Convention Center, San Jose, California, USA
    Event typeConference

    Country of activity

    • United States

    Publication forum classification

    • No publication forum level