Temperature mapping in thermal RF plasma CVD using laser Rayleigh scattering

Rolf Gustaf Runarsson Hernberg (Speaker)

    Activity: Talk or presentationConference presentation

    Period1997
    Event titleProceedings of Optics Day 97, February 21, 1997, Physics Series Report, Tampere, Finland
    Event typeConference

    Country of activity

    • Finland

    Publication forum classification

    • No publication forum level