Väitöskirjan esitarkastaja, Pre-examination of doctoral thesis: Alén, P., Atomic Layer Deposition of TaN, NbN, and MoN films for Cu Metallization

Tapio Mäntylä (Examiner)

    Activity: Evaluation, examination and supervisionPre-examination of dissertation or acting as opponent to doctoral students

    Period2005
    Examinee
    Examination held atUniversity of Helsinki

    Publication forum classification

    • No publication forum level

    Country of activity

    • Finland