A 3 DOF piezohydraulic parallel micromanipulator

P. Kallio, M. Lind, Q. Zhou, H.N. Koivo

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    34 Citations (Scopus)
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    The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellows results in a new type of parallel structure, where the joints are integrated into actuator links. The joint-free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control is organised in four levels for non-linearity compensation, position feedback control, supervision and tackling of automatic operations. The presented micromanipulator provides an exceptional combination of submicrometer resolution, large work space, miniature size and advanced control.
    Translated title of the contributionA 3 DOF piezohydraulic parallel micromanipulator
    Original languageEnglish
    Title of host publicationProceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium
    Publication statusPublished - 1998
    Publication typeA4 Article in conference proceedings

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