A maskless exposure device for rapid photolithographic prototyping of sensor and microstructure layouts

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    Translated title of the contributionA maskless exposure device for rapid photolithographic prototyping of sensor and microstructure layouts
    Original languageEnglish
    Title of host publicationEurosensors XXIV. Conference Proceedings (preliminary CD-ROM issue), September 5-8, 2010, Linz, Austria
    EditorsBernhard Jakoby, Michael Vellekop
    Pages1-4
    Number of pages4
    DOIs
    Publication statusPublished - 2010
    Publication typeA4 Article in a conference publication

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