Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates

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Translated title of the contribution	Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates
Original language	English
Pages (from-to)	2932
Journal	Journal of Vacuum Science & Technology A
Volume	4
Issue number	6
Publication status	Published - 1986
Publication type	A1 Journal article-refereed

Publication forum classification

@article{38ed01ccad8e4f908091f4e40855eaa0,

title = "Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates",

author = "P. Vuoristo and T. M{\"a}ntyl{\"a} and P. Kettunen",

note = "Contribution: organisation=mol,FACT1=1",

year = "1986",

language = "English",

volume = "4",

pages = "2932",

journal = "Journal of Vacuum Science \& Technology A",

issn = "1944-2807",

number = "6",

}

TY - JOUR

T1 - Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates

AU - Vuoristo, P.

AU - Mäntylä, T.

AU - Kettunen, P.

N1 - Contribution: organisation=mol,FACT1=1

PY - 1986

Y1 - 1986

M3 - Article

SN - 1944-2807

VL - 4

SP - 2932

JO - Journal of Vacuum Science & Technology A

JF - Journal of Vacuum Science & Technology A

IS - 6

ER -