ALD coating of porous silicon

K Grigoras, J Keskinen, E Yli-Rantala, H Välimäki, P Kauranen, S Laakso, J Ahopelto, M Prunnila

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Original languageEnglish
Title of host publicationBaltic ALD 2014 conference, Helsinki, May 11-13, 2014
Pages57
Number of pages1
Publication statusPublished - 2014
Externally publishedYes
Publication typeB3 Non-refereed article in conference proceedings

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