All printed flexible piezoelectric pressure sensor with interdigitated electrodes

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Abstract

Owing to their cost-effective fabrication, skin-conformability, and charge generation, printed flexible piezoelectric pressure sensors based on poly(vinylidenefluoride-co-trifluoroethylene) P(VDF-TrFE) have high potential to be used in affordable, unobtrusive and energy-autonomous systems for various healthcare and robotics applications. This study presents a simple two printing step fabrication process for a thin (overall thickness of ~11 µm) flexible piezoelectric sensor based on an interdigitated electrode (IDE) structure. Inkjet printing is used to fabricate a poly(3, 4-ethylenedioxythiophene): poly(styrene sulfonate) (PEDOT:PSS) IDE structure with an electrode gap width of 67.9 ± 9.4 µm and an electrode width of 137.8 ± 17.5 µm on a Parylene-C substrate. This is followed by bar coating a layer of piezoelectric polymer (P(VDF-TrFE)) of 9.6 ± 0.9 µm thick. The optimal electric field for poling the piezoelectric material is 50 V/µm which results in a remanent polarization of 5.2 ± 1.0 µC/cm2. The piezoelectric sensitivity was measured in normal mode obtaining a result of 3.9 ± 0.5 pC/N. In conclusion, this study demonstrates the potential of additive fabrication technologies to develop low-cost and conformal piezoelectric pressure sensors.

Original languageEnglish
Title of host publicationProceedings - 2020 IEEE 8th Electronics System-Integration Technology Conference, ESTC 2020
PublisherIEEE
Number of pages6
ISBN (Electronic)978-1-7281-6293-5
ISBN (Print)9781728162928
DOIs
Publication statusPublished - 15 Sep 2020
Publication typeA4 Article in a conference publication
EventIEEE Electronics System-Integration Technology Conference - Tonsberg, Vestfold, Norway
Duration: 15 Sep 202018 Sep 2020

Publication series

NameProceedings - 2020 IEEE 8th Electronics System-Integration Technology Conference, ESTC 2020

Conference

ConferenceIEEE Electronics System-Integration Technology Conference
Country/TerritoryNorway
CityTonsberg, Vestfold
Period15/09/2018/09/20

Keywords

  • E-skin
  • Interdigitated electrodes
  • P(VDF-TrFE)
  • Pressure sensor
  • Printed electronics

Publication forum classification

  • Publication forum level 1

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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