| Original language | English |
|---|---|
| Patent number | WO 2016/177888 Al |
| Publication status | Published - 11 Oct 2016 |
| Publication type | H1 Granted patent |
An etching mask and a method to produce an etching mask
Sozaraj Rasappa (Inventor)
Research output: Patent
Sozaraj Rasappa (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | WO 2016/177888 Al |
| Publication status | Published - 11 Oct 2016 |
| Publication type | H1 Granted patent |