Abstract
This study reports a Si RITD whose characteristics improve with increasing anneal time, resulting in a peak current density (J P ) and PVCR up to 2.97 kA/cm 2 and 3.08, respectively.
| Original language | English |
|---|---|
| Title of host publication | 2007 International Semiconductor Device Research Symposium, ISDRS |
| Publisher | IEEE |
| ISBN (Print) | 1424418917, 9781424418916 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Publication type | A4 Article in conference proceedings |
| Event | International Semiconductor Device Research Symposium - College Park, MD, United States Duration: 12 Dec 2007 → 14 Dec 2007 |
Conference
| Conference | International Semiconductor Device Research Symposium |
|---|---|
| Country/Territory | United States |
| City | College Park, MD |
| Period | 12/12/07 → 14/12/07 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials