Applications of nanoimprint lithography in nanophotonics

J. Viheriälä, T. Niemi, J. Kontio, T. Rytkönen, A. Tukiainen, M. Pessa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Translated title of the contributionApplications of nanoimprint lithography in nanophotonics
    Original languageEnglish
    Title of host publicationProceedings of the XL Annual Conference of the Finnish Physical Society, 9-11 March, 2006, Tampere, Finland. Tampere University of Technology. Institute of Physics. Report
    EditorsM. Kauranen
    Pagesp. 208
    Publication statusPublished - 2006
    Publication typeB3 Article in conference proceedings

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