Applications of UV-nanoimprint soft stamps in fabrication of single-frequency diode lasers

J. Viheriälä, J. Tommila, T. Leinonen, M. Dumitrescu, L. Toikkanen, T. Niemi, M. Pessa

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Translated title of the contribution	Applications of UV-nanoimprint soft stamps in fabrication of single-frequency diode lasers
Original language	English
Pages (from-to)	321-324
Journal	Microelectronic Engineering
Volume	86
Issue number	3
DOIs	https://doi.org/10.1016/j.mee.2008.10.010
Publication status	Published - 2009
Publication type	A1 Journal article-refereed

Publication forum classification

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title = "Applications of UV-nanoimprint soft stamps in fabrication of single-frequency diode lasers",

author = "J. Viheri{\"a}l{\"a} and J. Tommila and T. Leinonen and M. Dumitrescu and L. Toikkanen and T. Niemi and M. Pessa",

note = "Contribution: organisation=orc,FACT1=1",

year = "2009",

doi = "10.1016/j.mee.2008.10.010",

language = "English",

volume = "86",

pages = "321--324",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

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}

TY - JOUR

T1 - Applications of UV-nanoimprint soft stamps in fabrication of single-frequency diode lasers

AU - Viheriälä, J.

AU - Tommila, J.

AU - Leinonen, T.

AU - Dumitrescu, M.

AU - Toikkanen, L.

AU - Niemi, T.

AU - Pessa, M.

N1 - Contribution: organisation=orc,FACT1=1

PY - 2009

Y1 - 2009

U2 - 10.1016/j.mee.2008.10.010

DO - 10.1016/j.mee.2008.10.010

M3 - Article

SN - 0167-9317

VL - 86

SP - 321

EP - 324

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 3

ER -