| Original language | English |
|---|---|
| Title of host publication | Proceedings of Eurosensors XIII |
| Pages | 531-532 |
| Publication status | Published - 1999 |
| Externally published | Yes |
| Publication type | A4 Article in conference proceedings |
Approximating circles by polygons in anisotropic etching of {100} silicon
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review