Arrays of metallic nanocones fabricated by UV-nanoimprint lithography

Research output: Contribution to journal › Article › Scientific › peer-review

41 Citations (Scopus)

Translated title of the contribution	Arrays of metallic nanocones fabricated by UV-nanoimprint lithography
Original language	English
Pages (from-to)	1711 - 1715
Journal	Microelectronic Engineering
Volume	87
Issue number	9
DOIs	https://doi.org/10.1016/j.mee.2009.08.015
Publication status	Published - 2010
Publication type	A1 Journal article-refereed

Publication forum classification

@article{056b445143a54fa1864bd3569749d029,

title = "Arrays of metallic nanocones fabricated by UV-nanoimprint lithography",

author = "Kontio, \{Juha M.\} and Janne Simonen and Juha Tommila and Markus Pessa",

note = "Contribution: organisation=orc,FACT1=1",

year = "2010",

doi = "10.1016/j.mee.2009.08.015",

language = "English",

volume = "87",

pages = "1711 -- 1715",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "9",

}

TY - JOUR

T1 - Arrays of metallic nanocones fabricated by UV-nanoimprint lithography

AU - Kontio, Juha M.

AU - Simonen, Janne

AU - Tommila, Juha

AU - Pessa, Markus

N1 - Contribution: organisation=orc,FACT1=1

PY - 2010

Y1 - 2010

U2 - 10.1016/j.mee.2009.08.015

DO - 10.1016/j.mee.2009.08.015

M3 - Article

SN - 0167-9317

VL - 87

SP - 1711

EP - 1715

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 9

ER -