Atomic-hydrogen mapping in hot-filament chemical-vapor deposition

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6 Citations (Scopus)

Translated title of the contribution	Atomic-hydrogen mapping in hot-filament chemical-vapor deposition
Original language	English
Pages (from-to)	765-769
Journal	Applied Optics
Volume	40
Issue number	6
Publication status	Published - 2001
Publication type	A1 Journal article-refereed

Publication forum classification

@article{8caec6abb25746c19309400e4cc5608f,

title = "Atomic-hydrogen mapping in hot-filament chemical-vapor deposition",

author = "J. Larjo and H. Koivikko and D. Li and R. Hernberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "2001",

language = "English",

volume = "40",

pages = "765--769",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "Optica Publishing Group",

number = "6",

}