Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes

K Grigoras, J Keskinen, E Yli-Rantala, S Laakso, H Välimäki, P Kauranen, J Ahopelto, M Prunnila

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Original languageEnglish
Title of host publicationALD 2014 14th International Conference on Atomic Layer Deposition
Pages301
Number of pages1
Publication statusPublished - 2014
Externally publishedYes
Publication typeB3 Article in conference proceedings

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