Characterisation of r.f. sputtered Fe-Cr-oxide films

T. Stenberg, J. Keränen, P. Vuoristo, T. Mäntylä, S. Virtanen, P. Schmuki, M. Büchler, H. Böhni

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Translated title of the contribution	Characterisation of r.f. sputtered Fe-Cr-oxide films
Original language	English
Pages (from-to)	477-483
Journal	Vacuum
Issue number	52
Publication status	Published - 1999
Publication type	A1 Journal article-refereed

Publication forum classification

@article{5ff36072961748cfa7ce4c9e8e563cd5,

title = "Characterisation of r.f. sputtered Fe-Cr-oxide films",

author = "T. Stenberg and J. Ker{\"a}nen and P. Vuoristo and T. M{\"a}ntyl{\"a} and S. Virtanen and P. Schmuki and M. B{\"u}chler and H. B{\"o}hni",

note = "Contribution: organisation=mol ker,FACT1=1",

year = "1999",

language = "English",

pages = "477--483",

journal = "Vacuum",

publisher = "Elsevier Limited",

number = "52",

}