Characteristics of two types of mems resonator structures in SOI applications

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Translated title of the contribution	Characteristics of two types of mems resonator structures in SOI applications
Original language	English
Title of host publication	203rd Meeting of The Electrochemical Society, Le Palais des Congrès, Paris, France, April 27 - May 2, 2003
Pages	267-272
Publication status	Published - 2003
Publication type	B3 Article in conference proceedings

Publication forum classification

@inproceedings{23d3228b6b424d619b85f318971e1602,

title = "Characteristics of two types of mems resonator structures in SOI applications",

author = "S. Myllym{\"a}ki and E. Ristolainen and P. Heino and A. Lehto and K. Varjonen",

note = "Contribution: organisation=ele,FACT1=1",

year = "2003",

language = "English",

pages = "267--272",

booktitle = "203rd Meeting of The Electrochemical Society, Le Palais des Congr{\`e}s, Paris, France, April 27 - May 2, 2003",

}

TY - GEN

T1 - Characteristics of two types of mems resonator structures in SOI applications

AU - Myllymäki, S.

AU - Ristolainen, E.

AU - Heino, P.

AU - Lehto, A.

AU - Varjonen, K.

N1 - Contribution: organisation=ele,FACT1=1

PY - 2003

Y1 - 2003

M3 - Conference contribution

SP - 267

EP - 272

BT - 203rd Meeting of The Electrochemical Society, Le Palais des Congrès, Paris, France, April 27 - May 2, 2003

ER -