CMOS-integrated film bulk acoustic resonators for label-free biosensing

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@article{1fef07897158461da1074d9bff678087,

title = "CMOS-integrated film bulk acoustic resonators for label-free biosensing",

author = "M Nirschl and A Rantala and K Tukkiniemi and S Auer and A-C Hellgren and D Pitzer and M Schreiter and I Vikholm-Lundin",

year = "2010",

doi = "10.3390/s100504180",

language = "English",

volume = "10",

pages = "4180--4193",

journal = "Sensors",

issn = "1424-8220",

publisher = "MDPI",

number = "5",

}

TY - JOUR

T1 - CMOS-integrated film bulk acoustic resonators for label-free biosensing

AU - Nirschl, M

AU - Rantala, A

AU - Tukkiniemi, K

AU - Auer, S

AU - Hellgren, A-C

AU - Pitzer, D

AU - Schreiter, M

AU - Vikholm-Lundin, I

PY - 2010

Y1 - 2010

U2 - 10.3390/s100504180

DO - 10.3390/s100504180

M3 - Article

SN - 1424-8220

VL - 10

SP - 4180

EP - 4193

JO - Sensors

JF - Sensors

IS - 5

ER -