| Original language | English |
|---|---|
| Patent number | US5949549 A |
| IPC | G01J3/50, G01J3/02 |
| Priority date | 26/08/97 |
| Publication status | Published - 7 Sept 1999 |
| Externally published | Yes |
| Publication type | H1 Granted patent |
| Original language | English |
|---|---|
| Patent number | US5949549 A |
| IPC | G01J3/50, G01J3/02 |
| Priority date | 26/08/97 |
| Publication status | Published - 7 Sept 1999 |
| Externally published | Yes |
| Publication type | H1 Granted patent |