Configurations of laser interference lithography for 2D/3D nanostructures of optical functional materials

Jin Zhang, Zuobin Wang, Ze Ji, Chunlei Tan, Shilei Jiang, Haisheng Liang, Huan Sun

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Translated title of the contributionConfigurations of laser interference lithography for 2D/3D nanostructures of optical functional materials
    Original languageEnglish
    Title of host publication2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 29 August - 1 Spetember 2012 Xi'an, China
    PublisherIEEE
    Pages169-174
    Number of pages6
    ISBN (Electronic)978-1-4673-4589-7
    ISBN (Print)978-1-4673-4588-0
    DOIs
    Publication statusPublished - 2012
    Publication typeA4 Article in conference proceedings

    Publication series

    NameInternational Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

    Publication forum classification

    • Publication forum level 1

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