Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Kestutis Grigoras, Jari Keskinen, Leif Grönberg, Elina Yli-Rantala, Sampo Laakso, Hannu Välimäki, Pertti Kauranen, Jouni Ahopelto, Mika Prunnila

Research output: Contribution to journalArticleScientificpeer-review

59 Citations (Scopus)
Original languageEnglish
Pages (from-to)340-345
Number of pages6
JournalNANO ENERGY
Volume26
DOIs
Publication statusPublished - 2016
Externally publishedYes
Publication typeA1 Journal article-refereed

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