Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Kestutis Grigoras; Jari Keskinen; Leif Grönberg; Elina Yli-Rantala; Sampo  Laakso; Hannu Välimäki; Pertti Kauranen; Jouni Ahopelto; Mika Prunnila

doi:10.1016/j.nanoen.2016.04.029

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Kestutis Grigoras
, Jari Keskinen
, Leif Grönberg
, Elina Yli-Rantala
, Sampo Laakso
, Hannu Välimäki
, Pertti Kauranen
, Jouni Ahopelto
, Mika Prunnila

Research output: Contribution to journal › Article › Scientific › peer-review

92 Citations (Scopus)

Original language	English
Pages (from-to)	340-345
Number of pages	6
Journal	NANO ENERGY
Volume	26
DOIs	https://doi.org/10.1016/j.nanoen.2016.04.029
Publication status	Published - 2016
Externally published	Yes
Publication type	A1 Journal article-refereed

Access to Document

10.1016/j.nanoen.2016.04.029

Cite this

@article{045712d232c24254a4d335a3adcbf760,

title = "Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors",

author = "Kestutis Grigoras and Jari Keskinen and Leif Gr{\"o}nberg and Elina Yli-Rantala and Sampo Laakso and Hannu V{\"a}lim{\"a}ki and Pertti Kauranen and Jouni Ahopelto and Mika Prunnila",

year = "2016",

doi = "10.1016/j.nanoen.2016.04.029",

language = "English",

volume = "26",

pages = "340--345",

journal = "NANO ENERGY",

issn = "2211-2855",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

AU - Grigoras, Kestutis

AU - Keskinen, Jari

AU - Grönberg, Leif

AU - Yli-Rantala, Elina

AU - Laakso, Sampo

AU - Välimäki, Hannu

AU - Kauranen, Pertti

AU - Ahopelto, Jouni

AU - Prunnila, Mika

PY - 2016

Y1 - 2016

U2 - 10.1016/j.nanoen.2016.04.029

DO - 10.1016/j.nanoen.2016.04.029

M3 - Article

SN - 2211-2855

VL - 26

SP - 340

EP - 345

JO - NANO ENERGY

JF - NANO ENERGY

ER -