Decreasing Defect-State Density of Al2O3/GaxIn1-xAs Device Interfaces with InOx Structures

  • Jaakko Mäkelä
  • , Marjukka Tuominen
  • , Johnny Dahl
  • , Sari Granroth
  • , Muhammad Yasir
  • , Juha-Pekka Lehtiö
  • , Rami-Roope Uusitalo
  • , Mikhail Kuzmin
  • , Marko Punkkinen
  • , Pekka Laukkanen
  • , Kalevi Kokko
  • , Roberto Félix
  • , Mika Lastusaari
  • , Ville Polojärvi
  • , Jari Lyytikäinen
  • , Antti Tukiainen
  • , Mircea Guina

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    13 Downloads (Pure)

    Abstract

    Control of defect densities at insulator/GaxIn1−xAs interfaces is essential for optimal operation of various devices like transistors and infrared detectors to suppress, for example, nonradiative recombination, Fermi-level pinning, and leakage currents. It is reported that a thin InOx interface layer is useful to limit the formation of these defects by showing effect of InOx on quantum efficiency of Ga0.45In0.55As detector and on photoluminescence of GaAs. A study of the Al2O3/GaAs interface via hard X-ray synchrotron photoelectron spectroscopy reveals chemical structure changes at the interface induced by this beneficial InOx incorporation: the InOx sheet acts as an O diffusion barrier that prevents oxidation of GaAs and concomitant As bond rupture.
    Original languageEnglish
    Article number1700722
    Number of pages7
    JournalAdvanced Materials Interfaces
    Volume4
    Issue number22
    Early online date19 Sept 2017
    DOIs
    Publication statusPublished - 2017
    Publication typeA1 Journal article-refereed

    Keywords

    • defects
    • GaAs
    • HAXPES
    • interface
    • oxide

    Publication forum classification

    • Publication forum level 1

    ASJC Scopus subject areas

    • General Physics and Astronomy

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