Diamond Film Synthesis on Mo in Thermal RF Plasma, Diamond Films '91 2nd European Conference on Diamond, Diamond-like and Related Coatings, Sept. 2-6, 1991, Nice, France

R. Hernberg; T. Lepistö; J. Vattulainen; T. Mäntylä; T. Stenberg

Diamond Film Synthesis on Mo in Thermal RF Plasma, Diamond Films '91 2nd European Conference on Diamond, Diamond-like and Related Coatings, Sept. 2-6, 1991, Nice, France

R. Hernberg
, T. Lepistö
, J. Vattulainen
, T. Mäntylä
, T. Stenberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

Translated title of the contribution	Diamond Film Synthesis on Mo in Thermal RF Plasma, Diamond Films '91 2nd European Conference on Diamond, Diamond-like and Related Coatings, Sept. 2-6, 1991, Nice, France
Original language	English
Title of host publication	Hyväksytty 12.12.91 julkaistavaksi lehdessä: Diamond and Related Materials
Publication status	Published - 1991
Publication type	B3 Article in conference proceedings

Publication forum classification

No publication forum level

Cite this

@inproceedings{2aef274023d649f29c4b74b9c653ef25,

title = "Diamond Film Synthesis on Mo in Thermal RF Plasma, Diamond Films '91 2nd European Conference on Diamond, Diamond-like and Related Coatings, Sept. 2-6, 1991, Nice, France",

author = "R. Hernberg and T. Lepist{\"o} and J. Vattulainen and T. M{\"a}ntyl{\"a} and T. Stenberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "1991",

language = "English",

booktitle = "Hyv{\"a}ksytty 12.12.91 julkaistavaksi lehdess{\"a}: Diamond and Related Materials",

}

Diamond Film Synthesis on Mo in Thermal RF Plasma, Diamond Films '91 2nd European Conference on Diamond, Diamond-like and Related Coatings, Sept. 2-6, 1991, Nice, France. / Hernberg, R.; Lepistö, T.; Vattulainen, J. et al.
Hyväksytty 12.12.91 julkaistavaksi lehdessä: Diamond and Related Materials. 1991.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

TY - GEN

T1 - Diamond Film Synthesis on Mo in Thermal RF Plasma, Diamond Films '91 2nd European Conference on Diamond, Diamond-like and Related Coatings, Sept. 2-6, 1991, Nice, France

AU - Hernberg, R.

AU - Lepistö, T.

AU - Vattulainen, J.

AU - Mäntylä, T.

AU - Stenberg, T.

N1 - Contribution: organisation=fys,FACT1=1

PY - 1991

Y1 - 1991

M3 - Conference contribution

BT - Hyväksytty 12.12.91 julkaistavaksi lehdessä: Diamond and Related Materials

ER -