Doping impurity distribution and crystal quality evaluation of AlGaAs:Si films (0.22

Y. Fedorenko, T. Jouhti, J. Konttinen, J. Likonen, M. Pessa

    Research output: Contribution to journalArticleScientificpeer-review

    Translated title of the contributionDoping impurity distribution and crystal quality evaluation of AlGaAs:Si films (0.22
    Original languageEnglish
    Pages (from-to)181-184
    JournalThin Solid Films
    Issue number428
    Publication statusPublished - 2003
    Publication typeA1 Journal article-refereed

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