Translated title of the contribution | Doping impurity distribution and crystal quality evaluation of AlGaAs:Si films (0.22 |
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Original language | English |
Pages (from-to) | 181-184 |
Journal | Thin Solid Films |
Issue number | 428 |
Publication status | Published - 2003 |
Publication type | A1 Journal article-refereed |
Publication forum classification
- No publication forum level