Abstract
This paper introduces a novel micro-force sensing approach utilizing an electroplated nickel microspring and a precision linear slider (PLS) for micro-tensile testing applications. After investigating the effects of friction forces in a PLS, an electroplated nickel microspring is designed, fabricated and integrated into the PLS, and the proposed micro-force sensor concept is validated through experimental results. The microspring fabricated in this paper is limited to forces up to 6 mN with the average sensitivity of 36.63 μN/μm. It is shown that the friction forces introduce uncertainties only to the forces less than 500 μN. The proposed approach allows the fabrication of micro-force sensors for the force ranges of up to tens of Millinewtons for different applications.
Original language | English |
---|---|
Title of host publication | 2015 IEEE International Conference on Robotics and Automation (ICRA), 26-30 May 2015,Seattle, WA |
Pages | 2679-2684 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 29 Jun 2015 |
Publication type | A4 Article in conference proceedings |
Event | IEEE International Conference on Robotics and Automation - Duration: 1 Jan 1900 → 1 Jan 2000 |
Conference
Conference | IEEE International Conference on Robotics and Automation |
---|---|
Period | 1/01/00 → 1/01/00 |
Publication forum classification
- Publication forum level 1
ASJC Scopus subject areas
- Software
- Artificial Intelligence
- Control and Systems Engineering
- Electrical and Electronic Engineering