Enhancing laser scanner accuracy by grid correction

Roni-Jussi Halme; Tero Kumpulainen; Reijo Tuokko

doi:10.1117/12.841741

Enhancing laser scanner accuracy by grid correction

Roni-Jussi Halme, Tero Kumpulainen, Reijo Tuokko

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Translated title of the contribution	Enhancing laser scanner accuracy by grid correction
Original language	English
Title of host publication	Photonics West 2010 - MOEMS-MEMS: Micro- and Nanofabrication, 23-28 January, 2010, San Francisco, California, USA. Proceedings of SPIE
Editors	Mary Ann Maher, Jung-Chih Chiao, J. Resnick Paul
Place of Publication	Bellingham, WA
Publisher	SPIE
Pages	1-9
Number of pages	9
ISBN (Print)	978-0-8194-8020-0
DOIs	https://doi.org/10.1117/12.841741
Publication status	Published - 2010
Publication type	A4 Article in conference proceedings
Event	SPIE CONFERENCE PROCEEDINGS - Duration: 1 Jan 1900 → …

Conference

Conference	SPIE CONFERENCE PROCEEDINGS
Period	1/01/00 → …

Publication forum classification

No publication forum level

Access to Document

10.1117/12.841741

Cite this

@inproceedings{6558d9ce17504b45ae0084cf4ae72aaa,

title = "Enhancing laser scanner accuracy by grid correction",

author = "Roni-Jussi Halme and Tero Kumpulainen and Reijo Tuokko",

note = "CCC code: 0277-786X/10<br/>Contribution: organisation=tte,FACT1=1; SPIE CONFERENCE PROCEEDINGS ; Conference date: 01-01-1900",

year = "2010",

doi = "10.1117/12.841741",

language = "English",

isbn = "978-0-8194-8020-0",

pages = "1--9",

editor = "Maher, {Mary Ann} and Jung-Chih Chiao and {Resnick Paul}, J.",

booktitle = "Photonics West 2010 - MOEMS-MEMS: Micro- and Nanofabrication, 23-28 January, 2010, San Francisco, California, USA. Proceedings of SPIE",

publisher = "SPIE",

address = "United States",

}

Halme, R-J, Kumpulainen, T & Tuokko, R 2010, Enhancing laser scanner accuracy by grid correction. in MA Maher, J-C Chiao & J Resnick Paul (eds), Photonics West 2010 - MOEMS-MEMS: Micro- and Nanofabrication, 23-28 January, 2010, San Francisco, California, USA. Proceedings of SPIE. SPIE, Bellingham, WA, pp. 1-9, SPIE CONFERENCE PROCEEDINGS, 1/01/00. https://doi.org/10.1117/12.841741

Enhancing laser scanner accuracy by grid correction. / Halme, Roni-Jussi; Kumpulainen, Tero; Tuokko, Reijo.
Photonics West 2010 - MOEMS-MEMS: Micro- and Nanofabrication, 23-28 January, 2010, San Francisco, California, USA. Proceedings of SPIE. ed. / Mary Ann Maher; Jung-Chih Chiao; J. Resnick Paul. Bellingham, WA: SPIE, 2010. p. 1-9.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Enhancing laser scanner accuracy by grid correction

AU - Halme, Roni-Jussi

AU - Kumpulainen, Tero

AU - Tuokko, Reijo

N1 - CCC code: 0277-786X/10<br/>Contribution: organisation=tte,FACT1=1

PY - 2010

Y1 - 2010

U2 - 10.1117/12.841741

DO - 10.1117/12.841741

M3 - Conference contribution

SN - 978-0-8194-8020-0

SP - 1

EP - 9

BT - Photonics West 2010 - MOEMS-MEMS: Micro- and Nanofabrication, 23-28 January, 2010, San Francisco, California, USA. Proceedings of SPIE

A2 - Maher, Mary Ann

A2 - Chiao, Jung-Chih

A2 - Resnick Paul, J.

PB - SPIE

CY - Bellingham, WA

T2 - SPIE CONFERENCE PROCEEDINGS

Y2 - 1 January 1900

ER -