@article{b0687a7c2c654d1dacd7c318f8fb61ac,
title = "Fabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructures",
author = "Chan, {Wing S.} and Saarinen, {Mika J.} and Talghader, {Joseph J.}",
note = "Contribution: organisation=orc,FACT1=1<br/>Portfolio EDEND: 2013-12-29<br/>Publisher name: American Institute of Physics AIP",
year = "2013",
language = "English",
volume = "102",
pages = "1--3",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "24",
}