Fabrication of germanium nanowire arrays by block copolymer lithography

Sozaraj Rasappa, Dipu Borah, Ramsankar Senthamaraikannan, Colm C. Faulkner, Jing J. Wang, Justin J. Holmes, Michael M. Morris

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)

    Abstract

    Germanium nanowires (GeNWs) have importance in emerging device applications because of their high hole mobility. Reported here is the fabrication of GeNWs on a SiO2 insulator substrate from a phase separated lamellar PS-b-PMMA block copolymer (BCP) by a simple and reproducible method. The parent BCP film was selectively etched to remove PMMA block generating PS template which was then used to fabricate GeNWs using a thermal evaporation technique. XRD, Raman and TEM cross-section analysis reveal the formation of GeNWs on SiO2 substrates. Thermal treatment of the GeNWs was used to probe thermal stability and crystallisation properties. It was observed that thermal treatment of GeNWs resulted in red-shifts in the Raman spectra. The results demonstrate an exciting nanofabrication technique for creating high density nanowires for the nanoelectronic industry.

    Original languageEnglish
    Pages (from-to)782-787
    Number of pages6
    JournalSCIENCE OF ADVANCED MATERIALS
    Volume5
    Issue number7
    DOIs
    Publication statusPublished - 2013
    Publication typeA1 Journal article-refereed

    Keywords

    • Etching
    • Germanium nanowires
    • PS template
    • PS-b-PMMA
    • Raman spectroscopy
    • Self-assembly
    • Thermal treatment
    • XRD analysis

    ASJC Scopus subject areas

    • General Materials Science

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