Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

L. Sainiemi, J. Viheriälä, J. Laukkanen, T. Niemi, S. Franssila

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Translated title of the contribution	Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes
Original language	English
Title of host publication	The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009
Pages	200-203
Publication status	Published - 2009
Publication type	A4 Article in conference proceedings

Publication forum classification

@inproceedings{f62e473a26d7421991904dabb2690019,

title = "Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes",

author = "L. Sainiemi and J. Viheri{\"a}l{\"a} and J. Laukkanen and T. Niemi and S. Franssila",

note = "Contribution: organisation=orc,FACT1=1",

year = "2009",

language = "English",

isbn = "978-1-4244-4193-8",

pages = "200--203",

booktitle = "The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009",

}

Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes. / Sainiemi, L.; Viheriälä, J.; Laukkanen, J. et al.
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009. 2009. p. 200-203.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

AU - Sainiemi, L.

AU - Viheriälä, J.

AU - Laukkanen, J.

AU - Niemi, T.

AU - Franssila, S.

N1 - Contribution: organisation=orc,FACT1=1

PY - 2009

Y1 - 2009

M3 - Conference contribution

SN - 978-1-4244-4193-8

SP - 200

EP - 203

BT - The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009

ER -