Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

L. Sainiemi, J. Viheriälä, J. Laukkanen, T. Niemi, S. Franssila

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Translated title of the contributionFabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes
    Original languageEnglish
    Title of host publicationThe 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009
    Pages200-203
    Publication statusPublished - 2009
    Publication typeA4 Article in conference proceedings

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