Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

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Translated title of the contribution	Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask
Original language	English
Title of host publication	EAC European Aerosol Conference 2007, September 9-14, 2007, Salzburg, Austria
Pages	1 p
Publication status	Published - 2007
Publication type	B3 Article in conference proceedings

Publication forum classification

@inproceedings{a0ea77ac1958412d95b552e00d312832,

title = "Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask",

author = "J.M. M{\"a}kel{\"a} and H. Keskinen and M. Aromaa and L. Sainiemi and L. Luosuj{\"a}rvi and T Kotiaho and S. Franssila",

note = "CD-ROm<br/>Contribution: organisation=fys,FACT1=1",

year = "2007",

language = "English",

pages = "1 p",

booktitle = "EAC European Aerosol Conference 2007, September 9-14, 2007, Salzburg, Austria",

}

TY - GEN

T1 - Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

AU - Mäkelä, J.M.

AU - Keskinen, H.

AU - Aromaa, M.

AU - Sainiemi, L.

AU - Luosujärvi, L.

AU - Kotiaho, T

AU - Franssila, S.

N1 - CD-ROm<br/>Contribution: organisation=fys,FACT1=1

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - 1 p

BT - EAC European Aerosol Conference 2007, September 9-14, 2007, Salzburg, Austria

ER -