Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)

M. A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A.S. Foster, R.M. Nieminen, K. Sato

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Translated title of the contribution	Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)
Original language	English
Pages (from-to)	pp. S27-S37
Journal	Journal of Micromechanics and Microengineering
Volume	17
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/17/4/S02
Publication status	Published - 2007
Externally published	Yes
Publication type	A1 Journal article-refereed

Publication forum classification

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title = "Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)",

author = "Gosalvez, {M. A.} and Y. Xing and T. Hynninen and M. Uwaha and A.S. Foster and R.M. Nieminen and K. Sato",

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year = "2007",

doi = "10.1088/0960-1317/17/4/S02",

language = "English",

volume = "17",

pages = "pp. S27--S37",

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TY - JOUR

T1 - Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)

AU - Gosalvez, M. A.

AU - Xing, Y.

AU - Hynninen, T.

AU - Uwaha, M.

AU - Foster, A.S.

AU - Nieminen, R.M.

AU - Sato, K.

N1 - Contribution: organisation=fys,FACT1=1

PY - 2007

Y1 - 2007

U2 - 10.1088/0960-1317/17/4/S02

DO - 10.1088/0960-1317/17/4/S02

M3 - Article

SN - 0960-1317

VL - 17

SP - pp. S27-S37

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -