Gas phase temperature mapping in thermal plasma diamond CVD

J. Larjo, J. Walewski, R. Hernberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Translated title of the contributionGas phase temperature mapping in thermal plasma diamond CVD
    Original languageEnglish
    Title of host publicationISPC-13 Symposium Proceedings. 13th International Symposium on Plasma Chemistry, Beijing, China, August 18-22, 1997
    EditorsC.K. Wu
    Pages231-234
    Publication statusPublished - 1997
    Publication typeB3 Article in conference proceedings

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