Highly Selective Etch Stop Layer for GaSb Substrate Removal

Jukka Lindfors, Jonna Paajaste, Riku Koskinen, Antti Härkönen, Soile Suomalainen, Mircea Guina

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Translated title of the contributionHighly Selective Etch Stop Layer for GaSb Substrate Removal
    Original languageEnglish
    Title of host publication16th Semiconducting and Insulating Materials Conference (SIMC-XVI) June 16 - 23, 2011, Stockholm, Sweden
    Place of PublicationStockholm
    PublisherRoyal Institute of Technology
    Number of pages1
    Publication statusPublished - 2011
    Publication typeA4 Article in a conference publication

    Publication series

    NameSemiconducting and Insulating Materials Conference SIMC
    PublisherRoyal Institute of Technology

    Publication forum classification

    • No publication forum level

    Cite this