In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate

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Abstract

In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests.

Original languageEnglish
Article number135824
Number of pages4
JournalMaterials Letters
Volume358
Early online date26 Dec 2023
DOIs
Publication statusPublished - 1 Mar 2024
Publication typeA1 Journal article-refereed

Keywords

  • High strain rate
  • Microcompression
  • Nanoindentation
  • SU-8 polymer

Publication forum classification

  • Publication forum level 1

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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