In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate

Rahul Cherukuri; Aloshious Lambai; Lassi Sukki; Jari Väliaho; Pasi Kallio; Essi Sarlin; Rajaprakash Ramachandramoorthy; Mikko Kanerva; Gaurav Mohanty

doi:10.1016/j.matlet.2023.135824

In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s⁻¹ strain rate

Rahul Cherukuri^*
, Aloshious Lambai
, Lassi Sukki
, Jari Väliaho
, Pasi Kallio
, Essi Sarlin
, Rajaprakash Ramachandramoorthy
, Mikko Kanerva
, Gaurav Mohanty

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

10 Citations (Scopus)

62 Downloads (Pure)

Abstract

In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10^-3 to 10³ s⁻¹. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s⁻¹ strain rate using nanoindentation based tests.

Original language	English
Article number	135824
Number of pages	4
Journal	Materials Letters
Volume	358
Early online date	26 Dec 2023
DOIs	https://doi.org/10.1016/j.matlet.2023.135824
Publication status	Published - 1 Mar 2024
Publication type	A1 Journal article-refereed

Funding

R.C., A.L. and G.M. acknowledge Research Council of Finland grant 341050. A.L. acknowledges Otto A. Malm foundation grant. Alemnis AG is acknowledged for technical support.

Funders	Funder number
Academy of Finland, Strategic Research Council	341050

Keywords

High strain rate
Microcompression
Nanoindentation
SU-8 polymer

Publication forum classification

Publication forum level 1

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/j.matlet.2023.135824Licence: CC BY

1-s2.0-S0167577X23020098-mainFinal published version, 3.36 MBLicence: CC BY

https://urn.fi/URN:NBN:fi:tuni-202401221653Licence: CC BY

Advanced mechanics of materials
Hokka, M. (Contact), Mohanty, G. (Contact) & Isakov, M. (Contact)
Materials Science and Environmental Engineering
Facility/equipment: Research infrastructure
Tampere Microscopy Center
Vippola, M. (Manager), Honkanen, M. (Operator) & Salminen, T. (Operator)
Faculty of Engineering and Natural Sciences
Facility/equipment: Research infrastructure

Cite this

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title = "In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate",

abstract = "In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests.",

keywords = "High strain rate, Microcompression, Nanoindentation, SU-8 polymer",

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doi = "10.1016/j.matlet.2023.135824",

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T1 - In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate

AU - Cherukuri, Rahul

AU - Lambai, Aloshious

AU - Sukki, Lassi

AU - Väliaho, Jari

AU - Kallio, Pasi

AU - Sarlin, Essi

AU - Ramachandramoorthy, Rajaprakash

AU - Kanerva, Mikko

AU - Mohanty, Gaurav

PY - 2024/3/1

Y1 - 2024/3/1

N2 - In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests.

AB - In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests.

KW - High strain rate

KW - Microcompression

KW - Nanoindentation

KW - SU-8 polymer

U2 - 10.1016/j.matlet.2023.135824

DO - 10.1016/j.matlet.2023.135824

M3 - Article

AN - SCOPUS:85181665120

SN - 0167-577X

VL - 358

JO - Materials Letters

JF - Materials Letters

M1 - 135824

ER -

In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate

Abstract

Funding

Keywords

Publication forum classification

ASJC Scopus subject areas

Access to Document

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Equipment

Advanced mechanics of materials

Tampere Microscopy Center

Cite this

In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s⁻¹ strain rate