@article{29501bb48fe44c408bd324d092e35275,
title = "Influence of plasma chemistry on impurity incorporation in AIN prepared by plasma enhanced atomic layer deposition",
author = "\{Pyymaki Perros\}, Alexander and Hanna Hakola and Timo Sajavaara and Teppo Huhtio and Harri Lipsanen",
note = "Contribution: organisation=keb,FACT1=1<br/>Portfolio EDEND: 2014-02-15<br/>Publisher name: Institute of Physics Publishing Ltd.",
year = "2013",
doi = "10.1088/0022-3727/46/50/505502",
language = "English",
volume = "46",
journal = "Journal of Physics D: Applied Physics",
issn = "0022-3727",
publisher = "Institute of Physics",
number = "50",
}