Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

14 Citations (Scopus)

Original language	English
Title of host publication	Handbook of Silicon Based MEMS Materials and Technologies
Publisher	Elsevier
Pages	550-564
Number of pages	15
Edition	2
ISBN (Print)	978-0-323-29965-7
DOIs	https://doi.org/10.1016/B978-0-323-29965-7.00026-9
Publication status	Published - 2015
Publication type	A3 Book chapter

Name	Micro and Nano Technologies

Publication forum classification

@inbook{cdcda545851848d98ba895781d3069c1,

title = "Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS",

author = "Fischer, \{Andreas C.\} and Matti M{\"a}ntysalo and Frank Niklaus",

year = "2015",

doi = "10.1016/B978-0-323-29965-7.00026-9",

language = "English",

isbn = "978-0-323-29965-7",

series = "Micro and Nano Technologies",

publisher = "Elsevier",

pages = "550--564",

booktitle = "Handbook of Silicon Based MEMS Materials and Technologies",

address = "Netherlands",

edition = "2",

}

Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS. / Fischer, Andreas C.; Mäntysalo, Matti; Niklaus, Frank.
Handbook of Silicon Based MEMS Materials and Technologies. 2. ed. Elsevier, 2015. p. 550-564 (Micro and Nano Technologies).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

TY - CHAP

T1 - Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS

AU - Fischer, Andreas C.

AU - Mäntysalo, Matti

AU - Niklaus, Frank

PY - 2015

Y1 - 2015

U2 - 10.1016/B978-0-323-29965-7.00026-9

DO - 10.1016/B978-0-323-29965-7.00026-9

M3 - Chapter

SN - 978-0-323-29965-7

T3 - Micro and Nano Technologies

SP - 550

EP - 564

BT - Handbook of Silicon Based MEMS Materials and Technologies

PB - Elsevier

ER -