Integrated photoreceiver array using molecular beam epitaxial regrowth

Paul R. Berger; Dexter A. Humphrey; Peter R. Smith; R. K. Montgomery; Niloy K. Dutta; D. Sivco; A. Y. Cho

doi:10.1109/ICIPRM.1992.235615

Integrated photoreceiver array using molecular beam epitaxial regrowth

Paul R. Berger, Dexter A. Humphrey, Peter R. Smith, R. K. Montgomery, Niloy K. Dutta, D. Sivco, A. Y. Cho

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Abstract

A photoreceiver linear array of 8-elements each composed of a p-i-n In_0.53Ga_0.47As photodiode integrated with a selectively regrown pseudomorphic In_0.65Ga_0.35As/In_0.52Al_0.48As modulation doped field effect transistor (MODFET) using molecular beam epitaxial (MBE) regrowth is investigated. MBE selective area regrowth enables a planarized monolithic integration with reduced parasitic capacitance over vertical monolithic integration.

Original language	English
Title of host publication	LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992
Publisher	IEEE
Pages	600-603
Number of pages	4
ISBN (Electronic)	0780305221, 9780780305229
ISBN (Print)	0-7803-0522-1
DOIs	https://doi.org/10.1109/ICIPRM.1992.235615
Publication status	Published - 1992
Externally published	Yes
Publication type	A4 Article in conference proceedings
Event	LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992 - Newport, United States Duration: 21 Apr 1992 → 24 Apr 1992

Publication series

Name	LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992

Conference

Conference	LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992
Country/Territory	United States
City	Newport
Period	21/04/92 → 24/04/92

ASJC Scopus subject areas

Hardware and Architecture
Electronic, Optical and Magnetic Materials
Computer Networks and Communications
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/ICIPRM.1992.235615

Cite this

Berger, P. R., Humphrey, D. A., Smith, P. R., Montgomery, R. K., Dutta, N. K., Sivco, D., & Cho, A. Y. (1992). Integrated photoreceiver array using molecular beam epitaxial regrowth. In LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992 (pp. 600-603). [235615] (LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992). IEEE. https://doi.org/10.1109/ICIPRM.1992.235615

Berger, Paul R. ; Humphrey, Dexter A. ; Smith, Peter R. et al. / Integrated photoreceiver array using molecular beam epitaxial regrowth. LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992. IEEE, 1992. pp. 600-603 (LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992).

@inproceedings{d4f23a8115cb4caeba7302e2e487facb,

title = "Integrated photoreceiver array using molecular beam epitaxial regrowth",

abstract = "A photoreceiver linear array of 8-elements each composed of a p-i-n In0.53Ga0.47As photodiode integrated with a selectively regrown pseudomorphic In0.65Ga0.35As/In0.52Al0.48As modulation doped field effect transistor (MODFET) using molecular beam epitaxial (MBE) regrowth is investigated. MBE selective area regrowth enables a planarized monolithic integration with reduced parasitic capacitance over vertical monolithic integration.",

author = "Berger, {Paul R.} and Humphrey, {Dexter A.} and Smith, {Peter R.} and Montgomery, {R. K.} and Dutta, {Niloy K.} and D. Sivco and Cho, {A. Y.}",

note = "Publisher Copyright: {\textcopyright} 1992 IEEE.; LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992 ; Conference date: 21-04-1992 Through 24-04-1992",

year = "1992",

doi = "10.1109/ICIPRM.1992.235615",

language = "English",

isbn = "0-7803-0522-1",

series = "LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992",

publisher = "IEEE",

pages = "600--603",

booktitle = "LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992",

}

Berger, PR, Humphrey, DA, Smith, PR, Montgomery, RK, Dutta, NK, Sivco, D & Cho, AY 1992, Integrated photoreceiver array using molecular beam epitaxial regrowth. in LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992., 235615, LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992, IEEE, pp. 600-603, LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992, Newport, United States, 21/04/92. https://doi.org/10.1109/ICIPRM.1992.235615

Integrated photoreceiver array using molecular beam epitaxial regrowth. / Berger, Paul R.; Humphrey, Dexter A.; Smith, Peter R. et al.

LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992. IEEE, 1992. p. 600-603 235615 (LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Integrated photoreceiver array using molecular beam epitaxial regrowth

AU - Berger, Paul R.

AU - Humphrey, Dexter A.

AU - Smith, Peter R.

AU - Montgomery, R. K.

AU - Dutta, Niloy K.

AU - Sivco, D.

AU - Cho, A. Y.

PY - 1992

Y1 - 1992

N2 - A photoreceiver linear array of 8-elements each composed of a p-i-n In0.53Ga0.47As photodiode integrated with a selectively regrown pseudomorphic In0.65Ga0.35As/In0.52Al0.48As modulation doped field effect transistor (MODFET) using molecular beam epitaxial (MBE) regrowth is investigated. MBE selective area regrowth enables a planarized monolithic integration with reduced parasitic capacitance over vertical monolithic integration.

AB - A photoreceiver linear array of 8-elements each composed of a p-i-n In0.53Ga0.47As photodiode integrated with a selectively regrown pseudomorphic In0.65Ga0.35As/In0.52Al0.48As modulation doped field effect transistor (MODFET) using molecular beam epitaxial (MBE) regrowth is investigated. MBE selective area regrowth enables a planarized monolithic integration with reduced parasitic capacitance over vertical monolithic integration.

U2 - 10.1109/ICIPRM.1992.235615

DO - 10.1109/ICIPRM.1992.235615

M3 - Conference contribution

AN - SCOPUS:85068259968

SN - 0-7803-0522-1

T3 - LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992

SP - 600

EP - 603

BT - LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992

PB - IEEE

T2 - LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992

Y2 - 21 April 1992 through 24 April 1992

ER -

Berger PR, Humphrey DA, Smith PR, Montgomery RK, Dutta NK, Sivco D et al. Integrated photoreceiver array using molecular beam epitaxial regrowth. In LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992. IEEE. 1992. p. 600-603. 235615. (LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992). doi: 10.1109/ICIPRM.1992.235615

Integrated photoreceiver array using molecular beam epitaxial regrowth

Abstract

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