Kinetic Gas and Electron Temperature Measurements in RF Induction Plasma

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Translated title of the contribution	Kinetic Gas and Electron Temperature Measurements in RF Induction Plasma
Original language	English
Title of host publication	Proceedings, Symposium 10th ISPC, Bochum, Germany, August 4-9, 1991, paper 1.2-6
Place of Publication	Bochum, Germany
Publication status	Published - 1991
Publication type	B3 Article in conference proceedings

Publication forum classification

@inproceedings{a9f738f0488e483c8168412f8f194722,

title = "Kinetic Gas and Electron Temperature Measurements in RF Induction Plasma",

author = "Hernberg, \{R. G.\} and Jaffe, \{S. M.\} and J. Larjo and Vattulainen, \{J. P.\}",

note = "Contribution: organisation=fys,FACT1=1",

year = "1991",

language = "English",

booktitle = "Proceedings, Symposium 10th ISPC, Bochum, Germany, August 4-9, 1991, paper 1.2-6",

}

TY - GEN

T1 - Kinetic Gas and Electron Temperature Measurements in RF Induction Plasma

AU - Hernberg, R. G.

AU - Jaffe, S. M.

AU - Larjo, J.

AU - Vattulainen, J. P.

N1 - Contribution: organisation=fys,FACT1=1

PY - 1991

Y1 - 1991

M3 - Conference contribution

BT - Proceedings, Symposium 10th ISPC, Bochum, Germany, August 4-9, 1991, paper 1.2-6

CY - Bochum, Germany

ER -